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Grating set for Z-axis SPM calibration with four different height gratings: 20nm, 110nm, 520nm, 1400nm

£492.00

Calibration grating set TGS1F is intended for Z-axis calibration of scanning probe microscopes and nonlinearity measurements.
Grating set contains 4 gratings TGZ1, TGZ2, TGZ3, TGZ4 with different step heights.

Step height:
TGZ1 – 20.0±1.5 nm*
TGZ2 – 110±2 nm*
TGZ3 – 520±4 nm*
TGZ4 – 1400±10 nm*
Period: 3±0.1 µm
Chip size: 5x5x0.5 mm
Effective area: central square 3×3 mm

* – the average meaning based on the measurements of 5 gratings with the same height (from the batch of 300 gratings) by AFM calibrated by PTB certified grating set TGS1. Basic step height can vary from the specified one within ±10 % depending on the batch (for example TGZ1 grating can have step height 22±1.5 nm).

SKU: TGS1F Category:
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Pack Size 1