Set of seven calibration standards for SPM lateral and vertical calibration

Grating set TGSFull consists of 7 calibration gratings: TGZ1, TGZ2, TGZ3, TGT1, TGQ1, TGG1, TGX1.

Grating set TGSFull can be used for:
SPM simultaneuos calibration in X, Y and Z directions;
lateral and vertical calibration;
detection of lateral non-linearity;
detection of hysteresis, creep, and cross-coupling effects;
detection of angular distortion;
for 3-D visualization of the scanning tip;
determination of tip sharpness parameters (aspect ratio and curvature radius), tip degradation and contamination control.
TGZ1 – for Z-axis calibration (step height 20,0±1.5 nm) and nonlinearity measurements
TGZ2 – for Z-axis calibration (step height 110,0±2 nm) and nonlinearity measurements
TGZ3 – for Z-axis calibration (step height 520 ± 3 nm) and nonlinearity measurements
TGX1 – for lateral scanner calibration, detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects, determination of the tip sharpness.
TGG1 – for AFM calibration in X or Y axis, detection of lateral and vertical scanner nonlinearity, tip sharpness characterization.
TGT1 – for tip shape and sharpness estimation, for image deconvolution and contamination control.
TGQ1 – for simultenious calibration in X,Y,Z directions. Step height 20±1.5nm.